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[TEM-EELS] Electron Energy Loss Spectroscopy

By measuring the energy lost due to interactions with atoms as electrons pass through thin film samples, the constituent elements and electronic structure of the material can be analyzed.

EELS analysis is a method that measures the energy lost by electrons as they pass through thin samples due to interactions with atoms. It can analyze the constituent elements and electronic structure of materials. Compared to the elemental analysis device (EDX) attached to a TEM, it has the following features: - Better sensitivity for light elements compared to EDX - Higher energy resolution compared to EDX - Higher spatial resolution compared to EDX, making it difficult to detect surrounding information - Chemical state analysis is possible for certain elements

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